High-Efficiency of PVD Coating Process by Applying an Additional Rotation

This article analyzes PVD coatings (physical vapor deposition—the coating material is vaporized and deposited by sputtering or arc evaporation, are applied at lower substrate temperatures thus can be to a wider range of substrates) samples which located in fixture. fixture enables additional rotation the sample via process. The allows an increase coated tools one batch, therefore current capacity machine. introductory section describes process product design, including its modifications. experimental focused on functionality checking proposed design. was carried out machine named INNOVA. To guarantee correct application during process, it necessary research thickness chemical composition compare these results with were without using designed Round bars diameter 10 mm chosen as test samples. On samples, FUTURA monolayer TiAlN base. Chemical evaluated scanning electron microscope (SEM). Using fourth rotation, same achieved those use rotation. Therefore, possible confirm